Opto-Edu (Beijing) Co., Ltd.
Opto-Edu (Beijing) Co., Ltd.
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| Specification | A63.7140 | A63.7160 | |
| Key Parameters | Resolution | 1.4nm@15kV(SE) 2.5nm@30.0kV(BSE) | 0.9nm@30kV(SE) 1.2nm@15kV(SE) 1.5nm@1kV(SE, BD mode) |
| Accelerating Voltage | 0.02kV～30kV | 0.02kV～30kV | |
| Magnification | 1～2000000x | 1～2000000x | |
| Electron Gun | Schottky Thermal Field Emission Gun | Schottky Thermal Field Emission Gun | |
| Probe Current | 1pA~40nA | 1pA~40nA | |
| Field of View | 6mm | 6mm | |
| Dwell Time | 20ns | 20ns | |
| Beam Deflection | -- | Dual Beam Deflection System: Electromagnetic & Static Hybrid Beam Deflection System | |
| Objective Lens | Dual Objective System: Magnetic Objective Lens & Electrostatic Objective Lens, Magnetic Sample Adaptable | Dual Objective System: Magnetic Objective Lens & Electrostatic Objective Lens, Magnetic Sample Adaptable | |
| Gun Aperture | (10μm,30μm,70μm,100μm,150μm,220μm)*2 Sets (1 For Backup), Motorized Moving | (10μm,30μm,70μm,100μm,150μm,220μm)*2 Sets (1 For Backup), Motorized Moving | |
| Chamber | Chamber Size | Width 370mm, Height 330mm, Depth 344mm | Width 370mm, Height 330mm, Depth 344mm |
| Extension Port | 10 Ports | 10 Ports | |
| Vaccum System | 2 Ion Pump 1 Turbo Molecular Pump 1 Mechanical Pump Oil Free | 2 Ion Pump 1 Turbo Molecular Pump 1 Mechanical Pump Oil Free | |
| Gun Vacuum: 2x10-7Pa Chamber Vacuum: 6x10-4Pa | Gun Vacuum: 2x10-7Pa Chamber Vacuum: 6x10-4Pa | ||
| Stage | 5 Axes Auto Stage, X:130mm, Y:130mm, Z:60mm, R: 360°, T: -10°～70°, Maximum load >500g | 5 Axes Auto Stage, X:130mm, Y:130mm, Z:60mm, R: 360°, T: -10°～70°, Maximum load >500g | |
| Camera | Optical Color Navigation CCD High Definition IR CCD | Optical Color Navigation CCD High Definition IR CCD | |
| Detectors & Extensions | Standard | SE Detector | SE Detector Inlens SE Detector |
| PC & Software | Computer | Working Station, Memory 16G, Hard Disk 512G, 24" Monitor, Win10 System | Working Station, Memory 16G, Hard Disk 512G, 24" Monitor, Win10 System |
| Control | Control Panel & Joystick | Control Panel & Joystick | |
| Software | Auto Focus, Auto Stigmator, Auto Brightness Contrast, Image Format TIFF,JPG,PNG,BMP, Image Output Resolution Max 16k*16k | Auto Focus, Auto Stigmator, Auto Brightness Contrast, Image Format TIFF,JPG,PNG,BMP, Image Output Resolution Max 16k*16k | |
| Optional Accessories | A50.7101 | BSE | BSE |
| A50.7102 | - | InLens BSE | |
| A50.7103 | Energy Dispersive Spectroscopy (EDS/EDX) | Energy Dispersive Spectroscopy (EDS/EDX) | |
| A50.7104 | Electron Backscatter Diffraction Pattern (EBSD) | Electron Backscatter Diffraction Pattern (EBSD) | |
| A50.7105 | EDS+EBSD | EDS+EBSD | |
| A50.7106 | Scanning Transmission Electron (STEM) | Scanning Transmission Electron (STEM) | |
| A50.7107 | Electron-beam-induced Current (EBIC) | Electron-beam-induced Current (EBIC) | |
| A50.7108 | Cathodoluminescence (CL) | Cathodoluminescence (CL) | |
| A50.7109 | Plasma | Plasma | |
| A50.7110 | Air Lock, Sample Exchange Warehouse | Air Lock, Sample Exchange Warehouse | |
| A50.7111 | Beam Blanker | Beam Blanker | |
| A50.7120 | Large lmage Stitching Software | Large lmage Stitching Software | |
| A50.7121 | Particle Analysis Software | Particle Analysis Software | |
| A50.7112 | Vacuum Transfer Holder | Vacuum Transfer Holder | |
| A50.7113 | Raman-SEM Correlative System | Raman-SEM Correlative System | |
| A50.7115 | UPS | UPS | |
| A50.7114 | - | Column built-in energy fiter ExB | |
| ▶ Strong Compatibility, High Adaptability Can be installed on different terminals, such as computers, mobile phones, and tablets, to control the electron microscope; This SEM-OS electron microscope operating system is compatible with SEM from various manufacturers and is compatible with multiple models, expanding the SEM ecosystem
▶ Integrated Software and Computing, Simple and Efficient Unified user interface, no need to repeatedly adapt to different terminals; Equipped with AI algorithms to collect information and present real-time output effects with clearer image quality and more prominent details; Kernel driven SEM accelerates hardware control |
| ① Menu bar, ② Quick operation area, ③ Data bar, ④ Monitoring area, ⑤ Navigation area, ⑥ Comprehensive area, ⑦ Operation area, ⑧ Status area |
| The A63.7140/A63.7160 series scanning electron microscope is equipped with IGS vacuum transfer rods, EDS energy spectrometers, Raman spectroscopy and other accessories, providing a comprehensive solution for lithium battery research from sample preparation, morphology observation, composition analysis, and structural analysis. |
| Step 1:The transfer rod is loaded onto the glove box to complete the sample transfer from the glove box to the transfer rod compartment.
Step 2:The sample transfer process involves transferring the positive pressure inside the rod chamber during the transfer process.
Step 3:The transfer rod is loaded onto the electron microscope to transfer the sample from the transfer rod chamber to the main chamber of the electron microscope.
Step 4:Sample shooting and data post-processing, customized development according to user needs.
▶ SEM+ EDS Spectrometer + Vacuum Transfer Rod + Raman Spectroscopy + Analysis Software
Structural analysis | Mechanism analysis | High precision displacement table ▪ Make up for the molecular structure analysis that EDS technology cannot achieve, and comprehensively grasp the sample composition ▪ Realize fast switching between Raman optical axis and electron beam optical axis, multi-dimensional analysis of sample characteristics, and real-time tracking. The structural evolution of materials during charging and discharging processes, and the in-depth study of their assisting mechanisms ▪ Large stroke high-precision high-speed piezoelectric ceramic displacement table, achieving integrated data acquisition at the same position, meeting Stability analysis of long-term confocal Raman surface |